MSB Series
Medium Frequency Sputtering Power Supply

The MSB Series relies on its excellent waveform modulation technology to output DC,DC pulse,bidirectional square wave,bidirectional trapezoidal wave and other waveform.The product has adjustable output waveform, selectable output frequency,adjustable duty cycle,and precise power control.As well as low energy storage and fast arc response. Provide convenient and precise control for the coating process.The products are mainly used in various thin film manufacturing processes, solar cell industry and vacuum coating industry;application processes: magnetron sputtering process,twin target sputtering,and tubularPECVD

Key features

● The combination of fully soft switching technology and third-generation semiconductor SiC as power devices results in excellent efficiency
● High speed sensor collects VI,FPGA fast processing,arc response time<100ns

● Adopting multiple intersecting PFC technology,with a power factor greater than 0.95
● Multiple arc detection methods selection,high reliability of arc extinguishing identification

● The output modes are diverse,and continuous and intermittent modes can be selected
● Control method UI.W selectable

The main parameters

Input

Input voltage 3AC400V,50/60Hz
Power factor ≥0.9
Conversion efficiency 94%

Output

Output voltage 600v,800V
Output current 50A—75A
Power level 30kW,20kW*2,25kW*2,30kW*2
Input channels 2 channels
Frequency 40kHz,40~200kHz

Performance index

Output current ripple 2% rms
Adjusting accuracy ±0.5%
Arc response time <100ns
Size 4U
Communication
Support analog and RS-485 communication(optional Profibus,ProfiNet,EtherCAT)

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

More information

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MSB Series Medium Frequency Sputtering Power Supply-Datasheet
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MSB SeriesMedium Frequency Sputtering Power Supply