Microwave switching power supply is a new type of microwave power supply based on IGBT high frequency inverter technology. It integrates anode high voltage power supply, filament power supply and magnetic field power supply (except 3kW microwave power supply). The wave magnetron provides working conditions. This product is used in MPCVD, microwave plasma etching, microwave plasma degumming and other fields.
● Fast response, precise control and good stability
● The product has constant voltage, constant power and constant current control modes
● All external connectors adopt quick-plug terminals and aerial plugs, which are convenient for installation and maintenance
● Flexible configuration of filament power supply, which can be built-in or external
● Rapid ignition detection and protection
● Rich and fast detection and protection functions
● RS485 standard communication interface
● Adopt standard chassis (3U: 3kW, 6kW, 6U: 10kW, 15kW, 25kW), easy to install
1kW Microwave power supply | 3kW Microwave power supply | 5kW Microwave power supply | 10kW Microwave power supply | 15kW Microwave power supply | 30kW Microwave power supply | 75kW Microwave power supply | 100kW Microwave power supply | |
Rated voltage and current of anode | 4.75kV370mA | 5.5kV1000mA | 7.2kV1300mA | 10kV1600mA | 12.5kV1800mA | 13kV3000mA | 18kV4500mA | |
Rated voltage and current of filament | DC3.5V10A | DC6V25A(built-in) | DC12V40A(External) | DC15V50A(External) | DC15V50A(External) | AC15V110A(External) | AC15V120A | |
Rated voltage and current of magnetic field | - | - | DC20V5A | DC100V5A | DC100V5A | DC100V5A | DC100V5A | DC100V10A |
Acess the ful technicaldocumentation for the HanYuan distributed charging system, including power cabinet and dispenserspecifications, dimensions,connector options,and installation requirements.
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