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MSD-series
MSD Series Sputtering Fais Fab Khoom Siv

MSD series DC sputtering fais fab mov txais yuav lub tuam txhab lub hauv paus DC tswj system ua ke nrog cov txheej txheem ua haujlwm zoo heev, yog li cov khoom muaj kev ua haujlwm ruaj khov heev, kev ntseeg siab ntawm cov khoom, kev puas tsuaj me me arc thiab cov txheej txheem rov ua dua zoo. Txais yuav Suav thiab lus Askiv zaub interface, yooj yim rau kev khiav lag luam.

01

Cov yam ntxwv tseem ceeb

  • ● Kev teeb tsa khib
  • ● Cov lus teb ceev ceev, lub sijhawm teb
  • ● Kev khaws cia hluav taws xob hauv qab,
  • ● Cov qauv teeb tsa me me, 3U tus qauv chassis
  • ● Cov qauv teeb tsa me me, 3U tus qauv chassis
  • ● Suav / Askiv zaub interface, yooj yim rau kev khiav lag luam
  • ● Kev tswj hwm meej
  • ● Ntau yam ntawm cov zis
  • ● Kev tiv thaiv zoo meej

Cov txheej txheem tseem ceeb

Cov tswv yim Lub zog hluav taws xob: 3AC380V ± 10%
Lub zog: 20kW, 30kW

Lub zog fais fab zaus: 50Hz / 60Hz
Tso zis Qhov siab tshaj plaws ntawm cov zis hluav taws xob: 800V
Tam sim no tso zis siab tshaj plaws: 50A, 75A
Cov zis tam sim no ripple: ≤3% rms
Cov zis hluav taws xob Ripple: ≤2% rms
Cov ntsuas kev txawj ntse Lub zog hluav taws xob: 1000V / 1200V xaiv tau
Kev hloov pauv zoo: 95%
Lub sijhawm tawm ntawm arc:
Kev sib txuas lus interface: Txheem RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau)
Qhov Loj (H * W * D) hli: 132 * 482 * 560: 176 * 482 * 700
Hom txias: cua txias
Lus Cim: cov khoom txuas ntxiv tsim kho tshiab thiab kev ua tau zoo txuas ntxiv txhim kho. Cov lus piav qhia txog qhov parameter no tsuas yog rau kev siv xwb.