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MSD series
MSD Series Sputtering Power Supply

MSD series DC sputtering power supply adopts the company’s core DC control system combined with excellent arc processing scheme, so that the product has very stable performance, high product reliability, small arc damage and good process repeatability. Adopt Chinese and English display interface, easy to operate.

01

Key features

  • ● Rack installation
  • ● Fast arc response, response time <100ns
  • ● Bottom energy storage, <1mJ/kW
  • ● Compact installation structure, 3U standard chassis
  • ● Compact installation structure, 3U standard chassis
  • ● Chinese/English display interface, easy to operate
  • ● Precise control
  • ● Wide range of output
  • ● Perfect protection function

The main parameters

Input Input voltage: 3AC380V±10%
Power: 20kW、30 kW

Input power frequency: 50Hz/60Hz
Output Max. output voltage: 800V
Max. output current: 50A、75A
Output current ripple: ≤3% rms
Output Voltage Ripple: ≤2% rms
Technical index Ignition voltage: 1000V / 1200V optional
Conversion efficiency: 95%
Arc off time: ＜100ns
Communication interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet and EtherCAT are optional)
Dimension(H*W*D)mm: 132*482*560: 176*482*700
Cooling mode: air cooling
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.