The RPJ Series relies on mature RF generation technology to provide customers with RF power supplies with greater power, higher precision, and fast response. Tool lt has functions such as phase setting and pulsecontrol. Applicable fields: photovoltaic industry, flat panel display industry, semiconductorindustry, chemicalindustry Industry, laboratory, scientificresearch,manufacturing,etc. Applicable processes: plasma enhanced chemicalvapor deposition (PECVD), plasma Sub-body etching, plasma cleaning, radio frequencyion source,plasmadiffusion,Plasma polymerization sputtering, reactive sputtering, etc.
● Fulldigital control, with convenient and rich operation menu
● Pulse and pulse synchronization functions
● Equipped with CEX phase synchronization function
● Improve protectionfunctions
| Input | |
| Input voltage | 3ΦAC208V ± 10%, 3ΦAC380V ± 5%, 47~63Hz |
| Output | |
| Output frequency | 13.56MHz、27.12MHz、40.68MHz |
| Output power | 1.5kW~6kW |
| Output power regulation range | 1% ~ 100% |
| Output impedance | 50Ω +j0 |
| Output interface | N-type |
| Output mode | Continuous, pulse |
| Pulse frequency | 100Hz~20kHz |
| Duty cycle | 5%~95% |
| Performance index | |
| Power factor | 0.98 |
| Frequency stabilization accuracy | ±0.005% |
| Efficiency | 75% (At rated output) |
| Harmonic | <-45dBc |
| Spurious | <-50dBc |
| Control features | |
| External control interface | Analog, communication, synchronization |
| Communication mode | Standard configured RS485 communication interface, Ethernet CAT, industrial Ethernet can be extended. |
Acess the ful technicaldocumentation for the HanYuan distributed charging system, including power cabinet and dispenserspecifications, dimensions,connector options,and installation requirements.
We'll Reach Out.
