MSD-series
Sputtering Fais Fab Khoom

Lub MSD series DC sputtering fais fab mov nta lub tuam txhab lub tshuab tswj DC siab heev uas sib xyaw ua ke nrog cov txheej txheem ua haujlwm arc zoo heev. Qhov kev sib koom ua ke no ua rau cov khoom muaj kev ruaj khov tsis sib xws, kev ntseeg siab dua, kev puas tsuaj arc tsawg kawg nkaus, thiab kev rov ua dua tshiab zoo heev. Lub zog muab hluav taws xob muaj lub interface zaub Suav thiab Askiv yooj yim rau tus neeg siv, ua rau kev ua haujlwm yooj yim. Nws cov qauv teeb tsa me me nyob hauv tus qauv 3U chassis, ua kom zoo dua qhov chaw siv. Kev tswj hwm qhov tseeb ntxiv txhim kho nws cov kev ua tau zoo tag nrho, ua rau nws yog qhov kev xaiv txhim khu kev qha thiab ua haujlwm tau zoo rau ntau yam kev siv.

Cov yam ntxwv tseem ceeb

● Kev teeb tsa khib
● Cov lus teb ceev ceev, lub sijhawm teb
● Kev khaws cia hluav taws xob hauv qab,

● Cov qauv teeb tsa me me, 3U tus qauv chassis
● Suav / Askiv zaub interface, yooj yim rau kev khiav lag luam
● Kev tswj hwm meej

● Ntau yam ntawm cov zis
● Kev tiv thaiv zoo meej

Cov txheej txheem tseem ceeb

Cov tswv yim

Lub zog hluav taws xob: 3AC380V ± 10%
Lub zog: 20kW, 30kW
Lub zog fais fab zaus: 50Hz / 60Hz

Tso zis

Qhov siab tshaj plaws ntawm cov zis hluav taws xob: 800V
Tam sim no tso zis siab tshaj plaws: 50A, 75A
Cov zis tam sim no ripple: ≤3% rms
Cov zis hluav taws xob Ripple: ≤2% rms

Cov ntsuas kev txawj ntse

Lub zog hluav taws xob: 1000V / 1200V xaiv tau
Kev hloov pauv zoo: 95%
Lub sijhawm tawm ntawm arc:
Kev sib txuas lus interface: Txheem RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau)
Qhov Loj (H * W * D) hli: 132 * 482 * 560, 176 * 482 * 700
Hom txias: cua txias

Lus Cim: cov khoom txuas ntxiv tsim kho tshiab thiab kev ua tau zoo txuas ntxiv txhim kho. Cov lus piav qhia txog qhov parameter no tsuas yog rau kev siv xwb.

Xav Paub Ntxiv

Lub MSD series DC sputtering fais fab mov, ib qho kev daws teeb meem tshiab uas qhia txog qhov zoo tshaj plaws ntawm kev nce qib thev naus laus zis. Muaj kev koom ua ke ntawm lub tuam txhab lub xeev-ntawm-tus-kos duab tseem ceeb DC tswj system nrog lub tshuab ua arc zoo heev, lub hwj chim mov no teeb tsa tus qauv tshiab hauv kev ua tau zoo thiab kev ntseeg siab. Ua los ntawm kev sib koom ua ke ntawm cov txheej txheem tswj hwm siab heev thiab cov thev naus laus zis ua arc tshiab, cov khoom no ua kom muaj kev ruaj khov tsis muaj qhov sib xws, tsa kev ntseeg siab mus rau qib tsis tau muaj dua. Arc puas tsuaj raug txo qis, thaum cov txheej txheem rov ua dua mus txog qhov siab tshaj plaws, ua kom ntseeg tau tias muaj cov txiaj ntsig zoo sib xws thiab meej nrog txhua qhov kev siv. Lub hwj chim mov yog nruab nrog lub interface zaub Suav thiab Askiv yooj yim rau tus neeg siv, ua rau kev ua haujlwm yooj yim. Nws cov qauv teeb tsa me me yog nyob hauv tus qauv 3U chassis, ua kom zoo dua qhov chaw siv. Kev meej hauv kev tswj hwm ntxiv txhim kho nws cov kev ua tau zoo tag nrho, ua rau nws yog qhov kev xaiv txhim khu kev qha thiab ua haujlwm tau zoo rau ntau yam kev siv.

Rub tawm

MSD Series Sputtering Power Supply-Datasheet
Rub tawm

Tiv tauj peb tam sim no

Peb txaus siab rau koj qhov kev txaus siab thiab zoo siab qhia koj. Tsuas yog muab qee cov ntaub ntawv rau peb kom peb thiaj li tiv tauj tau koj.

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Rov qab mus rau Chaw daws teeb meem fais fab

MSD-seriesSputtering Fais Fab Khoom