MSD series
Sputtering Power Supply
01
- ● Rack installation
- ● Fast arc teb, teb lub sij hawm
- ● Hauv qab lub zog cia,
- ● Compact installation qauv, 3U txheem chassis
- ● Suav/English zaub interface, yooj yim rau kev khiav lag luam
- ● Precise tswj
- ● Ntau yam ntawm cov zis
- ● Kev tiv thaiv zoo meej muaj nuj nqi
Tswv yim
- Tawm tswv yim voltage: 3AC380V ± 10%
- Lub Zog: 20kW, 30kW
- Input zog zaus: 50Hz / 60Hz
Tso zis
- Max. Cov zis hluav taws xob: 800V
- Max. tso zis tam sim no: 50A, 75A
- Cov zis tam sim no ripple: ≤3% rms
- Cov zis Voltage Ripple: ≤2% rms
Technical Performance index
- Ignition voltage: 1000V / 1200V yeem
- Conversion efficiency: 95%
- Arc tawm lub sijhawm: 100ns
- Kev sib txuas lus interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet thiab EtherCAT yog xaiv tau)
- Qhov Loj (H * W * D) mm: 132 * 482 * 560, 176 * 482 * 700
- Txias hom: cua txias
Nco tseg: cov khoom lag luam txuas ntxiv tsim kho tshiab thiab kev ua haujlwm txuas ntxiv txhim kho. Qhov no parameter piav qhia yog rau siv xwb.
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MSD Series Sputtering Power Supply-Datasheet
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