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MSD series
Sputtering Power Supply

The MSD series DC sputtering power supply features the company's advanced core DC control system seamlessly integrated with an exceptional arc processing scheme. This synergy results in a product with unparalleled stability, heightened reliability, minimal arc damage, and exceptional process repeatability. The power supply is equipped with a user-friendly Chinese and English display interface, facilitating easy operation. Its compact installation structure is housed within a standard 3U chassis, optimizing space utilization. The precision in control further enhances its overall performance, making it a reliable and efficient choice for various applications.

Sputtering Power Supply
01

Key features

  • ● Rack installation
  • ● Fast arc response, response time <100ns
  • ● Bottom energy storage, <1mJ/kW
  • ● Compact installation structure, 3U standard chassis
  • ● Chinese/English display interface, easy to operate
  • ● Precise control
  • ● Wide range of output
  • ● Perfect protection function

The main parameters

Input

  • Input voltage: 3AC380V±10%
  • Power: 20kW、30 kW
  • Input power frequency: 50Hz/60Hz

Output

  • Max. output voltage: 800V
  • Max. output current: 50A、75A
  • Output current ripple: ≤3% rms
  • Output Voltage Ripple: ≤2% rms

Technical index

  • Ignition voltage: 1000V / 1200V optional
  • Conversion efficiency: 95%
  • Arc off time: ＜100ns
  • Communication interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet and EtherCAT are optional)
  • Dimension(H*W*D)mm: 132*482*560，176*482*700
  • Cooling mode: air cooling

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

More Information

The MSD series DC sputtering power supply, a cutting-edge solution showcasing the pinnacle of technological advancement. Boasting the integration of the company's state-of-the-art core DC control system with an outstanding arc processing mechanism, this power supply sets a new standard in performance and reliability. Crafted through the seamless fusion of advanced control systems and innovative arc processing technology, this product ensures unparalleled stability, elevating reliability to unprecedented levels. Arc damage is minimized, while process repeatability reaches exceptional heights, ensuring consistent and precise results with every use. The power supply is equipped with a user-friendly Chinese and English display interface, facilitating easy operation. Its compact installation structure is housed within a standard 3U chassis, optimizing space utilization. The precision in control further enhances its overall performance, making it a reliable and efficient choice for various applications.

Download

  • MSD Series Sputtering Power Supply-Datasheet

    65975ba2yuDownload

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