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TPH10
RMA Series Matchers

It can be adapted to RLS series RF power supply, and is widely used in plasma etching, coating, plasma cleaning, plasma degumming and other processes. When used alone, it can be used together with other manufacturers’ RF power supplies.

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Key features

  • ● Full digital control, high matching accuracy and short matching time
  • ● Adopt vacuum capacitor, high reliability and long service life
  • ● Compact structure, small size, easy installation
  • ● Ultra-wide matching range, can be customized to fit any load
  • ● With manual/automatic matching function
  • ● With hold and preset function
  • ● With communication function, it can be independently connected to the host computer to display the load status in real time
  • ● Customizable output interface

The main parameters

Technical index Control voltage: AC220V±10%
Transmission power: 0.5~5kW
Frequency: 2MHz、13.56MHz、27.12MHz、40.68MHz
Matching time: end to end ＜ 5S, preset point to matching point ＜ 0.5 ~ 3S
Standing wave: ＜1.2
Impedance real part: 5~200Ω
Impedance imaginary part: +200~-200j
RF output voltage: 4000Vpeak
RF output current: 25~40Arms
Input interface: type N
Output interface: copper bar or L29
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

More information

Download

  • TPH10 General-purpose Single-phase Power Controller-Datasheet

    65975ba8pbDownload
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