Microwave Power Supply

Microwave switching power supply is a new type of microwave power supply based on IGBT high frequency inverter technology. It integrates anode high voltage power supply, filament power supply and magnetic field power supply (except 3kW microwave power supply). The wave magnetron provides working conditions. This product is used in MPCVD, microwave plasma etching, microwave plasma degumming and other fields.

Key features

● High frequency inverter technology, high power density, small size and high reliability
● Fast response, precise control and good stability
● The product has constant voltage, constant power and constant current control modes

● All external connectors adopt quick-plug terminals and aerial plugs, which are convenient for installation and maintenance
● Flexible configuration of filament power supply, which can be built-in or external
● Rapid ignition detection and protection

● Rich and fast detection and protection functions
● RS485 standard communication interface
● Adopt standard chassis (3U: 3kW, 6kW, 6U: 10kW, 15kW, 25kW), easy to install

The main parameters

	1kW Microwave power supply	3kW Microwave power supply	5kW Microwave power supply	10kW Microwave power supply	15kW Microwave power supply	30kW Microwave power supply	75kW Microwave power supply	100kW Microwave power supply
Rated voltage and current of anode	4.75kV370mA	5.5kV1000mA	7.2kV1300mA		10kV1600mA	12.5kV1800mA	13kV3000mA	18kV4500mA
Rated voltage and current of filament	DC3.5V10A	DC6V25A(built-in)	DC12V40A(External)		DC15V50A(External)	DC15V50A(External)	AC15V110A(External)	AC15V120A
Rated voltage and current of magnetic field	-	-	DC20V5A	DC100V5A	DC100V5A	DC100V5A	DC100V5A	DC100V10A
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.