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PDB Series
RHH Series RF Fais Fab Khoom Siv

RHH series RF fais fab mov siv cov thev naus laus zis RF tsim kom muaj zog dua, muaj kev ntsuas siab dua thiab teb sai rau cov neeg siv khoom. Nrog theem tuaj yeem teeb tsa, tswj tau lub zog, kho digital thiab lwm yam haujlwm. Cov teb siv tau: kev lag luam photovoltaic, kev lag luam zaub tiaj tus, kev lag luam semiconductor, kev lag luam tshuaj lom neeg, chaw kuaj mob, kev tshawb fawb, kev tsim khoom, thiab lwm yam.
Cov txheej txheem siv tau: plasma enhanced chemical vapor deposition (PECVD), plasma etching, plasma cleaning, radio frequency ion source, plasma diffusion, plasma polymerization sputtering, reactive sputtering, thiab lwm yam.

01

Cov yam ntxwv tseem ceeb

  • ● Ib nrab cib thiab cov qauv mount khib
  • ● Txais yuav tag nrho cov kev tswj hwm digital, nrog rau cov ntawv qhia zaub mov ua haujlwm yooj yim thiab nplua nuj
  • ● Kev kho zaus, kev ua haujlwm ntawm lub zog thiab kev sib dhos ntawm lub zog
  • ● Nrog CEX theem synchronization muaj nuj nqi
  • ● Kev tiv thaiv zoo meej

Cov txheej txheem tseem ceeb

Qauv qhia:

Cov tswv yim Cov tswv yim voltage: AC220V ± 10% 3ΦAC380V ± 5% (Cov lus qhia tshwj xeeb tuaj yeem hloov kho)
Zaus nkag: 47 ~ 63Hz
Tso zis Zaus tso zis: 13.56MHz, 27.12MHz, 40.68MHz
Kev kho qhov ntau: ± 5%
Lub zog tso zis: 1.5 ~ 5kW
Kev tswj hwm ntau yam ntawm cov zis hluav taws xob: 1 ~ 100%
Cov zis impedance: 50Ω + j0
Cov zis interface: hom N
Hom tso zis: tas mus li, pulse
Lub zog zaus: 100Hz ~ 100kHz
Lub voj voog ua haujlwm: 5 ~ 95%
Kev ntsuas kev ua tau zoo Lub zog fais fab: 0.98
Kev ruaj khov zaus raug: ± 0.005%
Kev Ua Haujlwm Zoo: 75% (ntawm cov zis ntsuas)
Harmonic: ＜-45dBc
Kev poob qis: ＜-50dBc
Kev sib txuas lus sab nraud: analog ntau, kev sib txuas lus thiab kev sib dhos
Hom kev sib txuas lus: Txheem RS485 kev sib txuas lus interface; Xaiv tau Ether CAT, kev lag luam Ethernet, thiab lwm yam.
Lus Cim: cov khoom txuas ntxiv tsim kho tshiab thiab kev ua tau zoo txuas ntxiv txhim kho. Cov lus piav qhia txog qhov parameter no tsuas yog rau kev siv xwb.