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MSB Series
Nruab Nrab Zaus Sputtering Fais Fab Khoom Siv

Cov MSB Series vam khom nws cov thev naus laus zis zoo heev los tsim DC, DC pulse, bidirectional square wave, bidirectional trapezoidal wave thiab lwm yam waveform. Cov khoom muaj cov zis waveform hloov kho tau, xaiv tau zaus tso zis, lub voj voog ua haujlwm hloov kho tau, thiab kev tswj hwm lub zog meej. Nrog rau kev khaws cia lub zog tsawg thiab teb sai arc. Muab kev tswj hwm yooj yim thiab meej rau cov txheej txheem txheej. Cov khoom lag luam feem ntau yog siv rau hauv ntau yam txheej txheem tsim cov yeeb yaj kiab nyias, kev lag luam hnub ci cell thiab kev lag luam txheej nqus tsev; cov txheej txheem thov: magnetron sputtering txheej txheem, twin target sputtering, thiab tubularPECVD

01

Cov yam ntxwv tseem ceeb

  • ● Kev sib xyaw ua ke ntawm cov thev naus laus zis hloov pauv mos mos thiab cov khoom siv hluav taws xob semiconductor SiC tiam thib peb ua rau muaj kev ua haujlwm zoo heev
  • ● Lub sensor ceev ceev sau VI, FPGA ua tiav sai, lub sijhawm teb arc
  • ● Txais yuav ntau yam kev siv tshuab PFC sib tshuam, nrog rau lub zog fais fab ntau dua 0.95
  • ● Xaiv ntau txoj kev nrhiav arc, kev ntseeg siab ntawm kev txheeb xyuas arc tua hluav taws
  • ● Cov hom tso zis muaj ntau yam, thiab cov hom txuas ntxiv mus thiab tsis tu ncua tuaj yeem xaiv tau
  • ● Txoj kev tswj UI.W xaiv tau

Cov txheej txheem tseem ceeb

Cov tswv yim

  • Lub zog hluav taws xob nkag 3AC400V, 50 / 60Hz
  • Lub zog fais fab ≥0.9
  • Kev hloov pauv zoo 94%

Tso zis

  • Qhov hluav taws xob tso zis 600v, 800V
  • Tam sim no tso zis 50A—75A
  • Qib fais fab 30kW, 20kW * 2,25kW * 2,30kW * 2
  • Cov channel nkag 2 channel
  • Zaus 40kHz, 40 ~ 200kHz

Kev ntsuas kev ua tau zoo

  • Cov zis tam sim no ripple 2% rms
  • Kho qhov tseeb ± 0.5%
  • Lub sijhawm teb arc
  • Loj 4U
  • Kev sib txuas lus
    Txhawb kev sib txuas lus analog thiab RS-485 (xaiv tau Profibus, ProfiNet, EtherCAT)

Lus Cim: cov khoom txuas ntxiv tsim kho tshiab thiab kev ua tau zoo txuas ntxiv txhim kho. Cov lus piav qhia txog qhov parameter no tsuas yog rau kev siv xwb.

Xav paub ntxiv

Rub tawm

  • MSB Series Nruab Nrab Zaus Sputtering Fais Fab Khoom Siv-Datasheet

    65975bapr0Rub tawm
Rov qab mus rau Chaw daws teeb meem fais fab