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HF-Energie

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RHH Serie RF StroumversuergungRHH Serie RF Stroumversuergung
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RHH Serie RF Stroumversuergung

D'RF-Stroumversuergung vun der RHH-Serie baséiert op enger reifer RF-Generatiounstechnologie, fir de Clienten eng RF-Stroumversuergung mat méi grousser Leeschtung, méi héijer Präzisioun a schneller Äntwert ze bidden. Mat Phasenastellung, Pulskontroll, digitaler Ofstëmmung an aner Funktiounen. Uwendbar Beräicher: Photovoltaikindustrie, Flaachbildschiermindustrie, Hallefleederindustrie, chemesch Industrie, Laboratoire, wëssenschaftlech Fuerschung, Fabrikatioun, etc.
Uwendbar Prozesser: Plasmaverstäerkt chemesch Dampfoflagerung (PECVD), Plasmaätzen, Plasmareinigung, Radiofrequenz-Ionenquell, Plasmadiffusioun, Plasmapolymerisatiounssputtering, reaktiv Sputtering, etc.

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